Download PDF by E. F. Skelton (auth.), Charles S. Barrett, John V.: Advances in X-Ray Analysis: Volume 31

By E. F. Skelton (auth.), Charles S. Barrett, John V. Gilfrich, Ron Jenkins, John C. Russ, James W. Richardson Jr., Paul K. Predecki (eds.)

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A. D. , "X-Ray Microanalysis in the Analytical Electron Microscope," Sandia National Laboratories Report, SAND82-2938, Albuquerque, New Mexico (1983). 11. A. D. Romig, Jr. and M. J. Carr, Thickness and Extinction Distance Measurements in Heavy Metal Thin Foils by Convergent Beam Electron Diffraction and X-Ray Absorption, in: "Analytical Electron Microscopy - 1984, ed. D. C. Joy and D. B. Williams, San Francisco Press, San Francisco, CA, 111 (1984). 12. B. K. Teo and D. C. Joy, "EXAFS Spectroscopies: Techniques and Applications," Plenum Press, New York (1981).

3 '4 CONVERGENT BEAK ELECTRON DIFFRACTION In addition to selected area diffraction (SAD) as performed in conventional TEM, modern AEMs are also capable of one or more microdiffraction techniques . The most powerful and frequently used microdiffraction technique is convergent beam electron diffraction (CBED). In this technique, a focussed and convergent beam is placed on the specimen at the point of interest. The resulting diffraction 18 I. MICROBEAM TECHNIQUES AND IMAGING METHODS FIGURE 5 [Ill] zone axis CBED patterns in Si.

X-rays cause low thermal loading. Materials which may"be thermally degraded or which contain volatile components can be analyzed. X-RAY MICROSCOPY High resolution x-ray imaging (x-ray microscopy) may be defined as the process of recording x-ray beams (or the secondary emissions they produce) which are spatially modulated by the materials under study, with resolutions of 10 Ilm or less. Low to medium energy x-rays «50 keV) are typically used in order to maintain high contrast and resolution. Until recently, most applications of x-ray microscopy have involved biological specimens.

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